Photochemical Maskant Emission Control in Semiconductor Industry

Compliance testing has been successfully completed on a MAXIM RTO controlling the emissions from a semiconductor chemical manufacturing process. The order for the new Colt RTO followed 10 years of operation for the existing Colt RTO on what is likely the most corrosive application we have encountered.

The original RTO was fabricated from AL6XN material, a high nickel alloy. In 2009, the owner changed the process and introduced a steam injection upstream of the RTO to control condensable materials that were building up on the inlet surfaces of the RTO and valves, which greatly accelerated corrosion.

The new MAXIM™ RTO was fabricated completely from 1/4" Hastalloy C-276. The anticipated life-cycle of this new system is expected to be fifteen years.

Issue

  • Corrosive process and steam injection accelerating corrosion
  • Ongoing repair of the RTO housing structure
  • RTO system repairs and downtime causing delays in production schedule

Solution

  • Performed coupon testing to determine best construction material
  • Selected Hastalloy C-276 based on highest corrosion resistance

Results

  • Installation of new all Hastalloy MAXIM™ RTO
  • Compliance testing successfully passed all emission standards

read about a thermal oxidizer overhaul and upgrade project

Colt Administration :  P.O. Box 1840 |  Rockwall,  TX 75087 |  (972) 385-7770